Leli thuluzi lamukela indlela yokulinganisa ye-interferometric okungathinteki kuyo, ayilimazi indawo yokusebenza ngesikhathi sokukala, ingakala ngokushesha izithombe ezinezinhlangothi ezintathu ze-micro-topography engaphezulu yezingxenye zokusebenza ezihlukahlukene, futhi ihlaziye futhi ibale ukulinganisa. imiphumela.
Incazelo Yomkhiqizo
Izici: Ifanele ukulinganisa ukukhahlamezeka kwendawo yamabhulokhi wegeji ahlukahlukene kanye nezingxenye ezibonakalayo; ukujula kwe-reticle yombusi kanye nokudayela; ubukhulu bokwemboza kwesakhiwo se-groove grating kanye ne-morphology yesakhiwo somngcele wokumboza; indawo engaphezulu yediski kazibuthe (optical) kanye nekhanda kazibuthe Isakhiwo sokulinganisa; I-silicon wafer surface roughness kanye nesilinganiso sesakhiwo sephethini, njll.
Ngenxa yokunemba okuphezulu kokulinganisa kwethuluzi, linezici zokungathinteki kanye nesilinganiso sezinhlangothi ezintathu, futhi yamukela ukulawula kwekhompyutha nokuhlaziya okusheshayo nokubalwa kwemiphumela yokulinganisa. Leli thuluzi lifanele wonke amazinga okuhlola nokulinganisa amayunithi ocwaningo, amagumbi okulinganisa ebhizinisi lezimboni nezimayini, ama-workshops okucubungula ukunemba, futhi afanele Izikhungo zemfundo ephakeme nezikhungo zocwaningo lwesayensi, njll.
Imingcele yezobuchwepheshe eyinhloko
Ibanga lokulinganisa lokujula kokungalingani kwe-microscopic
Endaweni eqhubekayo, lapho kungekho ukuphakama ushintsho olusheshayo olukhulu kuno-1/4 wevelength phakathi kwamaphikseli amabili ancikene: 1000-1nm
Uma kukhona ukuguqulwa kobude okukhulu kuno-1/4 we-wavelength phakathi kwamaphikseli amabili aseduze: 130-1nm
Ukuphindaphinda kokulinganisa: δRa ≤0.5nm
Ukukhulisa ilensi yenhloso: 40X
Isimbobo sezinombolo: Φ 65
Ibanga lokusebenza: 0.5mm
Inkambu yensimbi yokubuka Okubonwayo: Φ0.25mm
Isithombe: 0.13×0.13mm
Ukukhulisa insimbi Okubonakalayo: 500×
Isithombe (esibhekwa isikrini sekhompyutha) -2500×
Uhlu lwesilinganiso somamukeli: 1000X1000
Usayizi wephikseli: 5.2×5.2µm
Isikhathi sokulinganisa isampula (ukuskena) isikhathi: 1S
Ukubonakala kwesibuko okujwayelekile kwensimbi (okuphezulu): ~50%
Ukubukeka (okuphansi): ~4%
Umthombo wokukhanyisa: Isibani se-incandescent 6V 5W
Ubude besihlungi sokuphazamiseka okuluhlaza: λ≒530nm
Ububanzi obuyingxenye λ≒10nm
Ukuphakanyiswa kwe-microscope okuyinhloko: 110 mm
Ukuphakama kwetafula: 5 mm
Ibanga lokunyakaza ku-X kanye no-Y ohlangothini: ~10 mm
Ibanga elijikelezayo le-worktable: 360°
Tshekisa ububanzi betafula lokusebenza: ±6°
Isistimu yekhompyutha: P4, 2.8G noma ngaphezulu, 17-inch flat-screen display enenkumbulo engu-1G noma ngaphezulu